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Jari Malm
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Jari
Malm
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Publications and other outputs
Thermomechanical properties of aluminum oxide thin films made by atomic layer deposition
(
2022
)
Ylivaara, Oili M. E.; et al.
;
A1
;
OA
Tribological properties of thin films made by atomic layer deposition sliding against silicon
(
2018
)
Kilpi, Laura; et al.
;
A1
;
OA
Characterization of ALD grown TixAlyN and TixAlyC thin films
(
2017
)
Kinnunen, Sami; et al.
;
A1
;
OA
Thin film growth into the ion track structures in polyimide by atomic layer deposition
(
2017
)
Mättö, Laura; et al.
;
A1
Broadband Ultrahigh-Resolution Spectroscopy of Particle-Induced X Rays : Extending the Limits of Nondestructive Analysis
(
2016
)
Palosaari, Mikko; et al.
;
A1
;
OA
Microscratch testing method for systematic evaluation of the adhesion of atomic layer deposited thin films on silicon
(
2016
)
Kilpi, Lauri; et al.
;
A1
;
OA
Normal-Metal–Insulator–Superconductor Tunnel Junction With Atomic-Layer-Deposited Titanium Nitride as Superconductor
(
2015
)
Torgovkin, Andrii; et al.
;
A1
;
OA
Nucleation and growth of ZnO on PMMA by low-temperature atomic layer deposition
(
2015
)
Napari, Mari; et al.
;
A1
;
OA
Influence of titanium-substrate roughness on Ca-P-O thin films grown by atomic layer deposition
(
2013
)
Sagari A.R. , Ananda; et al.
;
A1
Last updated on 2024-17-04 at 21:22