A1 Journal article (refereed)
Area‐Selective Atomic Layer Deposition on Functionalized Graphene Prepared by Reversible Laser Oxidation (2022)
Mentel, K. K., Emelianov, A. V., Philip, A., Johansson, A., Karppinen, M., & Pettersson, M. (2022). Area‐Selective Atomic Layer Deposition on Functionalized Graphene Prepared by Reversible Laser Oxidation. Advanced Materials Interfaces, 9(29), Article 2201110. https://doi.org/10.1002/admi.202201110
JYU authors or editors
Publication details
All authors or editors: Mentel, Kamila K.; Emelianov, Aleksei V.; Philip, Anish; Johansson, Andreas; Karppinen, Maarit; Pettersson, Mika
Journal or series: Advanced Materials Interfaces
eISSN: 2196-7350
Publication year: 2022
Publication date: 03/09/2022
Volume: 9
Issue number: 29
Article number: 2201110
Publisher: Wiley
Publication country: Germany
Publication language: English
DOI: https://doi.org/10.1002/admi.202201110
Publication open access: Openly available
Publication channel open access: Partially open access channel
Publication is parallel published (JYX): https://jyx.jyu.fi/handle/123456789/83243
Abstract
Area-selective atomic layer deposition (ALD) is a promising “bottom-up” alternative to current nanopatterning techniques. While it has been successfully implemented in traditional microelectronic processes, selective nucleation of ALD on 2D materials has so far remained an unsolved challenge. In this article, a precise control of the selective deposition of ZnO on graphene at low temperatures (<250 °C) is demonstrated. Maskless femtosecond laser writing is used to locally activate predefined surface areas (down to 300 nm) by functionalizing graphene to achieve excellent ALD selectivity (up to 100%) in these regions for 6-nm-thick ZnO films. The intrinsic conductive properties of graphene can be restored by thermal annealing at low temperature (300 °C) without destroying the deposited ZnO patterns. As the graphene layer can be transferred onto other material surfaces, the present patterning technique opens new attractive ways for various applications in which the functionalized graphene is utilized as a template layer for selective deposition of desired materials.
Keywords: nanotechnology; nanostructures; atomic layer deposition; graphene
Free keywords: Area-selective atomic layer deposition; nanopatterning
Contributing organizations
Related projects
- Direct laser writing of electronic devices on graphene by two-photon oxidation and nitrogen doping
- Pettersson, Mika
- Research Council of Finland
- Towards graphene-based neuroprosthetics
- Pettersson, Mika
- Jane and Aatos Erkko Foundation
Ministry reporting: Yes
Reporting Year: 2022
JUFO rating: 1