A1 Journal article (refereed)
The impact of the density and type of reactive sites on the characteristics of the atomic layer deposited WNC films (2006)

Hoyas, A. M., Travaly, Y., Schuhmacher, J., Sajavaara, T., Whelan, C., Eyckens, B., Richard, O., Giangrandi, S., Brijs, B., Vandervorst, W., Maex, K., Celis, J., Jonas, A., & Vantomme, A. (2006). The impact of the density and type of reactive sites on the characteristics of the atomic layer deposited WNC films. J. Appl. Phys..

JYU authors or editors

Publication details

All authors or editors: Hoyas, A. Martin; Travaly, Y.; Schuhmacher, J.; Sajavaara, Timo; Whelan, C.M.; Eyckens, B.; Richard, O.; Giangrandi, S.; Brijs, B.; Vandervorst, W.; et al.

Journal or series: J. Appl. Phys.

Publication year: 2006

Publication language: English

Publication open access: Not open

Publication channel open access: 

Additional information: A. Martin Hoyas, Y. Travaly, J. Schuhmacher, T. Sajavaara, C. M. Whelan, B. Eyckens, O. Richard, S. Giangrandi, B. Brijs, W. Vandervorst, K. Maex, J. P. Celis, A. M. Jonas, A. Vantomme The impact of the density and type of reactive sites on the characteristics of the atomic layer deposited WNC films J. Appl. Phys. 99 (2006) 063515

Contributing organizations

Ministry reporting: Yes

Preliminary JUFO rating: Not rated