D5 Textbook, professional manual or guide
Valolitografia (2009)


Karvonen, J., Nevanpää, T., & Lindell, A. (2009). Valolitografia. http://nanokoulu.jyu.fi/opetus/nanotoiden-ohjeita-ja-materiaaleja


JYU authors or editors


Publication details

All authors or editors: Karvonen, Jenni; Nevanpää, Tom; Lindell, Anssi

Publication year: 2009

Publisher: Unknown

Publication language: Finnish

Persistent website address: http://nanokoulu.jyu.fi/opetus/nanotoiden-ohjeita-ja-materiaaleja

Publication open access: Not open

Publication channel open access:


Keywords: nanotechnology

Free keywords: Photolithography; nanofabrication

Fields of science:


Contributing organizations


Ministry reporting: Yes

Preliminary JUFO rating: Not rated


Last updated on 2021-18-08 at 09:37