D5 Textbook, professional manual or guide
Valolitografia (2009)

Karvonen, J., Nevanpää, T., & Lindell, A. (2009). Valolitografia. http://nanokoulu.jyu.fi/opetus/nanotoiden-ohjeita-ja-materiaaleja

JYU authors or editors

Publication details

All authors or editors: Karvonen, Jenni; Nevanpää, Tom; Lindell, Anssi

Publication year: 2009

Publisher: Unknown

Publication language: Finnish

Persistent website address: http://nanokoulu.jyu.fi/opetus/nanotoiden-ohjeita-ja-materiaaleja

Publication open access: Not open

Publication channel open access:

Keywords: nanotechnology

Free keywords: Photolithography; nanofabrication

Contributing organizations

Ministry reporting: Yes

Preliminary JUFO rating: Not rated