A1 Journal article (refereed)
Fabrication of a negative PMMA master mold for soft-lithography by MeV ion beam lithography (2012)

Puttaraksa, N., Unai, S., Rhodes, M. W., Singkarat, K., Whitlow, H., & Singkarat, S. (2012). Fabrication of a negative PMMA master mold for soft-lithography by MeV ion beam lithography. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 272, 149. doi:10.1016/j.nimb.2011.01.053

JYU authors or editors

Publication details

All authors or editors: Puttaraksa, Nitipon; Unai, S.; Rhodes, M.W.; Singkarat, K.; Whitlow, Harry; Singkarat, S.

Journal or series: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

ISSN: 0168-583X

Publication year: 2012

Volume: 272

Pages range: 149

Publisher: Elsevier

Place of Publication: Amsterdam

Publication country: Netherlands

Publication language: English

DOI: https://doi.org/10.1016/j.nimb.2011.01.053

Open Access: Publication channel is not openly available

Additional information: Proceedings of the 17th International Conference on Ion Beam Modification of Materials (IBMM 2010)

Free keywords: Ion beam lithography; PMMA

Contributing organizations

Ministry reporting: Yes

Reporting Year: 2012

JUFO rating: 1