A1 Journal article (refereed)
Influence of MeV H^{+} ion beam flux on cross-linking and blister formation in PMMA resist (2012)

Unai, S., Puttaraksa, N., Pussadee, N., Singkarat, K., Rhodes, M.W., Whitlow, H., & Singkarat, S. (2012). Influence of MeV H^{+} ion beam flux on cross-linking and blister formation in PMMA resist. Maejo International Journal of Science and Technology, 6(1), 70. http://www.mijst.mju.ac.th/vol6/70-76.pdf

JYU authors or editors

Publication details

All authors or editors: Unai, S.; Puttaraksa, Nitipon; Pussadee, N.; Singkarat, K.; Rhodes, M.W.; Whitlow, Harry; Singkarat, S.

Journal or series: Maejo International Journal of Science and Technology

ISSN: 1905-7873

Publication year: 2012

Volume: 6

Issue number: 1

Pages range: 70

Publisher: Maejo University

Place of Publication: Chiang Mai

Publication country: Thailand

Publication language: English

Persistent website address: http://www.mijst.mju.ac.th/vol6/70-76.pdf

Publication open access: Openly available

Publication channel open access: Open Access channel

Free keywords: Ion beam lithography; PMMA

Contributing organizations

Ministry reporting: Yes

Reporting Year: 2012

JUFO rating: 1