A1 Journal article (refereed)
Fabrication of superconducting tantalum nitride thin films using infrared pulsed laser deposition (2013)


Chaudhuri, S., Maasilta, I., Chandernagor, L., Ging, M., & Lahtinen, M. (2013). Fabrication of superconducting tantalum nitride thin films using infrared pulsed laser deposition. Journal of Vacuum Science and Technology A, 31(6), Article 061502. https://doi.org/10.1116/1.4812698


JYU authors or editors


Publication details

All authors or editorsChaudhuri, Saumyadip; Maasilta, Ilari; Chandernagor, Lucie; Ging, Marion; Lahtinen, Manu

Journal or seriesJournal of Vacuum Science and Technology A

ISSN0734-2101

eISSN1520-8559

Publication year2013

Volume31

Issue number6

Article number061502

PublisherAmerican Institute of Physics

Place of PublicationCollege Park, MD

Publication countryUnited States

Publication languageEnglish

DOIhttps://doi.org/10.1116/1.4812698

Publication open accessNot open

Publication channel open access

Publication is parallel publishedhttp://arxiv.org/abs/1302.4579


Free keywordsExperimental materials physics; superconducting; Tantalum nitride; X-ray diffraction; pulsed laser deposition; thin film


Contributing organizations


Ministry reportingYes

Reporting Year2013

JUFO rating1


Last updated on 2023-14-12 at 03:21