A4 Article in conference proceedings
RBS and PIXE analysis of chlorine contamination in ALD-Grown TiN films on silicon (2013)
Meersschaut, J., Käyhkö, M., Lenka, H.P., Witters, T., Zhao, Q., Vantomme, A., & Vandervorst, W. (2013). RBS and PIXE analysis of chlorine contamination in ALD-Grown TiN films on silicon. In Application of accelerators in research and industry: Twenty-Second International Conference (pp. 190-194). American Institute of Physics. AIP Conference Proceedings, 1525. https://doi.org/10.1063/1.4802317
JYU authors or editors
Publication details
All authors or editors: Meersschaut, J.; Käyhkö, Marko; Lenka, H.P.; Witters, T.; Zhao, Q.; Vantomme, A.; Vandervorst, W.
Parent publication: Application of accelerators in research and industry: Twenty-Second International Conference
ISBN: 978-0-7354-1148-7
Journal or series: AIP Conference Proceedings
ISSN: 0094-243X
eISSN: 1935-0465
Publication year: 2013
Number in series: 1525
Pages range: 190-194
Publisher: American Institute of Physics
Place of Publication: College Park, MD
Publication country: United States
Publication language: English
DOI: https://doi.org/10.1063/1.4802317
Publication open access: Not open
Publication channel open access:
Keywords: atomic layer deposition; thin films
Free keywords: Rutherford backscattering; titanium compounds; X-ray emission spectra
Contributing organizations
Ministry reporting: Yes
Reporting Year: 2013
JUFO rating: 1