A1 Journal article (refereed)
Nucleation and growth of ZnO on PMMA by low-temperature atomic layer deposition (2015)


Napari, M., Malm, J., Lehto, R., Julin, J., Arstila, K., Sajavaara, T., & Lahtinen, M. (2015). Nucleation and growth of ZnO on PMMA by low-temperature atomic layer deposition. Journal of Vacuum Science and Technology A, 33(1), Article 01A128. https://doi.org/10.1116/1.4902326


JYU authors or editors


Publication details

All authors or editors: Napari, Mari; Malm, Jari; Lehto, Roope; Julin, Jaakko; Arstila, Kai; Sajavaara, Timo; Lahtinen, Manu

Journal or series: Journal of Vacuum Science and Technology A

ISSN: 0734-2101

eISSN: 1520-8559

Publication year: 2015

Volume: 33

Issue number: 1

Article number: 01A128

Publisher: American Institute of Physics

Publication country: United States

Publication language: English

DOI: https://doi.org/10.1116/1.4902326

Publication open access: Not open

Publication channel open access:

Publication is parallel published (JYX): https://jyx.jyu.fi/handle/123456789/44857


Free keywords: zinc oxide films; thin film growth


Contributing organizations


Ministry reporting: Yes

Reporting Year: 2015

JUFO rating: 1


Last updated on 2021-20-09 at 16:17