A1 Journal article (refereed)
Nucleation and growth of ZnO on PMMA by low-temperature atomic layer deposition (2015)
Napari, M., Malm, J., Lehto, R., Julin, J., Arstila, K., Sajavaara, T., & Lahtinen, M. (2015). Nucleation and growth of ZnO on PMMA by low-temperature atomic layer deposition. Journal of Vacuum Science and Technology A, 33(1), Article 01A128. https://doi.org/10.1116/1.4902326
JYU authors or editors
Publication details
All authors or editors: Napari, Mari; Malm, Jari; Lehto, Roope; Julin, Jaakko; Arstila, Kai; Sajavaara, Timo; Lahtinen, Manu
Journal or series: Journal of Vacuum Science and Technology A
ISSN: 0734-2101
eISSN: 1520-8559
Publication year: 2015
Volume: 33
Issue number: 1
Article number: 01A128
Publisher: American Institute of Physics
Publication country: United States
Publication language: English
DOI: https://doi.org/10.1116/1.4902326
Publication open access: Not open
Publication channel open access:
Publication is parallel published (JYX): https://jyx.jyu.fi/handle/123456789/44857
Free keywords: zinc oxide films; thin film growth
Contributing organizations
Ministry reporting: Yes
Reporting Year: 2015
JUFO rating: 1