A1 Journal article (refereed)
Nanotribological, nanomechanical and interfacial characterization of atomic layer deposited TiO2 on a silicon substrate (2015)


Lyytinen, J., Liu, X., Ylivaara, O. M., Sintonen, S., Iyer, A., Ali, S., Julin, J., Sajavaara, T., Puurunen, R. L., & Koskinen, J. (2015). Nanotribological, nanomechanical and interfacial characterization of atomic layer deposited TiO2 on a silicon substrate. Wear, 342–343(15 November), 270-278. https://doi.org/10.1016/j.wear.2015.09.001


JYU authors or editors


Publication details

All authors or editorsLyytinen, Jussi; Liu, Xuwen; Ylivaara, Oili M.E.; Sintonen, Sakari; Iyer, Ajai; Ali, Saima; Julin, Jaakko; Sajavaara, Timo; Puurunen, Riikka L.; Koskinen, Jari

Journal or seriesWear

ISSN0043-1648

eISSN1873-2577

Publication year2015

Volume342–343

Issue number15 November

Pages range270–278

PublisherElsevier BV

Publication countryNetherlands

Publication languageEnglish

DOIhttps://doi.org/10.1016/j.wear.2015.09.001

Publication open accessNot open

Publication channel open access


Keywordsatomic layer deposition

Free keywordsinterfacial characterization; nanomechanical characterization; nanoscratch; nanotribology; scanning nanowear


Contributing organizations


Ministry reportingYes

Reporting Year2015

JUFO rating1


Last updated on 2023-13-12 at 21:32