A1 Journal article (refereed)
Nanotribological, nanomechanical and interfacial characterization of atomic layer deposited TiO2 on a silicon substrate (2015)
Lyytinen, J., Liu, X., Ylivaara, O. M., Sintonen, S., Iyer, A., Ali, S., Julin, J., Sajavaara, T., Puurunen, R. L., & Koskinen, J. (2015). Nanotribological, nanomechanical and interfacial characterization of atomic layer deposited TiO2 on a silicon substrate. Wear, 342–343(15 November), 270-278. https://doi.org/10.1016/j.wear.2015.09.001
JYU authors or editors
Publication details
All authors or editors: Lyytinen, Jussi; Liu, Xuwen; Ylivaara, Oili M.E.; Sintonen, Sakari; Iyer, Ajai; Ali, Saima; Julin, Jaakko; Sajavaara, Timo; Puurunen, Riikka L.; Koskinen, Jari
Journal or series: Wear
ISSN: 0043-1648
eISSN: 1873-2577
Publication year: 2015
Volume: 342–343
Issue number: 15 November
Pages range: 270–278
Publisher: Elsevier BV
Publication country: Netherlands
Publication language: English
DOI: https://doi.org/10.1016/j.wear.2015.09.001
Publication open access: Not open
Publication channel open access:
Keywords: atomic layer deposition
Free keywords: interfacial characterization; nanomechanical characterization; nanoscratch; nanotribology; scanning nanowear
Contributing organizations
Ministry reporting: Yes
Reporting Year: 2015
JUFO rating: 1