A1 Journal article (refereed)
Unusual stoichiometry control in the atomic layer deposition of manganese borate films from manganese bis(tris(pyrazolyl)borate) and ozone (2016)

Klesko, J. P., Bellow, J. A., Saly, M. J., Winter, C. H., Julin, J., & Sajavaara, T. (2016). Unusual stoichiometry control in the atomic layer deposition of manganese borate films from manganese bis(tris(pyrazolyl)borate) and ozone. Journal of Vacuum Science and Technology A, 34(5), Article 051515. https://doi.org/10.1116/1.4961385

JYU authors or editors

Publication details

All authors or editors: Klesko, Joseph P.; Bellow, James A.; Saly, Mark J.; Winter, Charles H.; Julin, Jaakko; Sajavaara, Timo

Journal or series: Journal of Vacuum Science and Technology A

ISSN: 0734-2101

eISSN: 1520-8559

Publication year: 2016

Volume: 34

Issue number: 5

Article number: 051515

Publisher: American Institute of Physics; American Vacuum Society

Publication country: United States

Publication language: English

DOI: https://doi.org/10.1116/1.4961385

Publication open access: Not open

Publication channel open access: 

Publication is parallel published (JYX): https://jyx.jyu.fi/handle/123456789/51351

Keywords: atomic layer deposition; ozone

Free keywords: metallic thin films; manganese borate

Contributing organizations

Ministry reporting: Yes

Reporting Year: 2016

JUFO rating: 1