A1 Journal article (refereed)
Aluminum oxide/titanium dioxide nanolaminates grown by atomic layer deposition : Growth and mechanical properties (2017)


Ylivaara, O. M. E., Kilpi, L., Liu, X., Sintonen, S., Ali, S., Laitinen, M., Julin, J., Haimi, E., Sajavaara, T., Lipsanen, H., Hannula, S.-P., Ronkainen, H., & Puurunen, R. L. (2017). Aluminum oxide/titanium dioxide nanolaminates grown by atomic layer deposition : Growth and mechanical properties. Journal of Vacuum Science and Technology A, 35(1), Article 01B105. https://doi.org/10.1116/1.4966198


JYU authors or editors


Publication details

All authors or editors: Ylivaara, Oili M. E.; Kilpi, Lauri; Liu, Xuwen; Sintonen, Sakari; Ali, Saima; Laitinen, Mikko; Julin, Jaakko; Haimi, Eero; Sajavaara, Timo; Lipsanen, Harri; et al.

Journal or series: Journal of Vacuum Science and Technology A

ISSN: 0734-2101

eISSN: 1520-8559

Publication year: 2017

Volume: 35

Issue number: 1

Article number: 01B105

Publisher: American Institute of Physics

Publication country: United States

Publication language: English

DOI: https://doi.org/10.1116/1.4966198

Publication open access: Not open

Publication channel open access:

Publication is parallel published (JYX): https://jyx.jyu.fi/handle/123456789/51857


Keywords: atomic layer deposition; aluminium

Free keywords: nanolaminates


Contributing organizations


Ministry reporting: Yes

Reporting Year: 2017

JUFO rating: 1


Last updated on 2021-09-06 at 07:14