A2 Review article, Literature review, Systematic review
Review Article: Recommended reading list of early publications on atomic layer deposition—Outcome of the “Virtual Project on the History of ALD” (2017)


Ahvenniemi, E., Akbashev, A. R., Ali, S., Bechelany, M., Berdova, M., Boyadjiev, S., Cameron, D. C., Chen, R., Chubarov, M., Cremers, V., Devi, A., Drozd, V., Elnikova, L., Gottardi, G., Grigoras, K., Hausmann, D. M., Hwang, C. S., Jen, S.-H., Kallio, T., . . . Yurkevich, O. (2017). Review Article: Recommended reading list of early publications on atomic layer deposition—Outcome of the “Virtual Project on the History of ALD”. Journal of Vacuum Science and Technology A, 35(1), Article 010801. https://doi.org/10.1116/1.4971389


JYU authors or editors


Publication details

All authors or editors: Ahvenniemi, Esko; Akbashev, Andrew R.; Ali, Saima; Bechelany, Mikhael; Berdova, Maria; Boyadjiev, Stefan; Cameron, David C.; Chen, Rong; Chubarov, Mikhail; Cremers, Veronique; et al.

Journal or series: Journal of Vacuum Science and Technology A

ISSN: 0734-2101

eISSN: 1520-8559

Publication year: 2017

Volume: 35

Issue number: 1

Article number: 010801

Publisher: AIP Publishing

Publication country: United States

Publication language: English

DOI: https://doi.org/10.1116/1.4971389

Publication open access: Openly available

Publication channel open access: Partially open access channel

Publication is parallel published (JYX): https://jyx.jyu.fi/handle/123456789/52742


Keywords: atomic layer deposition

Free keywords: semiconductor manufacturing; history of technology


Contributing organizations


Ministry reporting: Yes

Reporting Year: 2017

JUFO rating: 1


Last updated on 2021-17-09 at 16:45