A2 Review article, Literature review, Systematic review
Review Article: Recommended reading list of early publications on atomic layer deposition—Outcome of the “Virtual Project on the History of ALD” (2017)
Ahvenniemi, E., Akbashev, A. R., Ali, S., Bechelany, M., Berdova, M., Boyadjiev, S., Cameron, D. C., Chen, R., Chubarov, M., Cremers, V., Devi, A., Drozd, V., Elnikova, L., Gottardi, G., Grigoras, K., Hausmann, D. M., Hwang, C. S., Jen, S.-H., Kallio, T., . . . Yurkevich, O. (2017). Review Article: Recommended reading list of early publications on atomic layer deposition—Outcome of the “Virtual Project on the History of ALD”. Journal of Vacuum Science and Technology A, 35(1), Article 010801. https://doi.org/10.1116/1.4971389
JYU authors or editors
Publication details
All authors or editors: Ahvenniemi, Esko; Akbashev, Andrew R.; Ali, Saima; Bechelany, Mikhael; Berdova, Maria; Boyadjiev, Stefan; Cameron, David C.; Chen, Rong; Chubarov, Mikhail; Cremers, Veronique; et al.
Journal or series: Journal of Vacuum Science and Technology A
ISSN: 0734-2101
eISSN: 1520-8559
Publication year: 2017
Volume: 35
Issue number: 1
Article number: 010801
Publisher: AIP Publishing
Publication country: United States
Publication language: English
DOI: https://doi.org/10.1116/1.4971389
Publication open access: Openly available
Publication channel open access: Partially open access channel
Publication is parallel published (JYX): https://jyx.jyu.fi/handle/123456789/52742
Keywords: atomic layer deposition
Free keywords: semiconductor manufacturing; history of technology
Contributing organizations
- Massachusetts Institute of Technology
- Military University of Technology
- NovaldMedical Ltd Oy
- Renewable Energy Development Center
- Research and Development Institute on Photovoltaic Energy
- Ruhr-Universität Bochum
- Saint Petersburg Electrotechnical University "LETI"
- Saint Petersburg University
- Seagate Technology, Northern Ireland
- Seitek50
Ministry reporting: Yes
Reporting Year: 2017
JUFO rating: 1