A1 Journal article (refereed)
Characterization of ALD grown TixAlyN and TixAlyC thin films (2017)

Kinnunen, S., Malm, J., Arstila, K., Lahtinen, M., & Sajavaara, T. (2017). Characterization of ALD grown TixAlyN and TixAlyC thin films. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 406(Part A), 152-155. https://doi.org/10.1016/j.nimb.2016.12.032

JYU authors or editors

Publication details

All authors or editors: Kinnunen, Sami; Malm, Jari; Arstila, Kai; Lahtinen, Manu; Sajavaara, Timo

Journal or series: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

ISSN: 0168-583X

eISSN: 1872-9584

Publication year: 2017

Volume: 406

Issue number: Part A

Pages range: 152-155

Publisher: Elsevier B.V.

Publication country: Netherlands

Publication language: English

DOI: https://doi.org/10.1016/j.nimb.2016.12.032

Publication open access: Not open

Publication channel open access: 

Publication is parallel published (JYX): https://jyx.jyu.fi/handle/123456789/55870

Additional information: Part of special issue: Proceedings of the 12th European Conference on Accelerators in Applied Research and Technology (ECAART12). 3rd–8th July 2016, Jyväskylä, Finland.

Free keywords: ALD; MAX-phases; ToF-ERDA

Contributing organizations

Ministry reporting: Yes

VIRTA submission year: 2017

JUFO rating: 1