A1 Journal article (refereed)
Effect of space charge on the negative oxygen flux during reactive sputtering (2017)


Moens, F., Kalvas, T., Steenberge, S. V., & Depla, D. (2017). Effect of space charge on the negative oxygen flux during reactive sputtering. Journal of Physics D: Applied Physics, 50 (11), 115201. doi:10.1088/1361-6463/aa5ab6


JYU authors or editors


Publication details

All authors or editors: Moens, F.; Kalvas, Taneli; Steenberge, S. Van; Depla, D.

Journal or series: Journal of Physics D: Applied Physics

ISSN: 0022-3727

Publication year: 2017

Volume: 50

Issue number: 11

Article number: 115201

Publisher: IOP Publishing

Publication country: United Kingdom

Publication language: English

DOI: https://doi.org/10.1088/1361-6463/aa5ab6

Open Access: Publication channel is not openly available


Free keywords: reactive magnetron sputtering; simulations; space charge effect; target erosion


Contributing organizations

Other organizations:


Ministry reporting: Yes

Reporting Year: 2017

JUFO rating: 1


Last updated on 2020-17-10 at 22:06