A1 Journal article (refereed)
Tribological properties of thin films made by atomic layer deposition sliding against silicon (2018)
Kilpi, L., Ylivaara, O. M. E., Vaajoki, A., Liu, X., Rontu, V., Sintonen, S., Haimi, E., Malm, J., Bosund, M., Tuominen, M., Sajavaara, T., Lipsanen, H., Hannula, S.-P., Puurunen, R. L., & Ronkainen, H. (2018). Tribological properties of thin films made by atomic layer deposition sliding against silicon. Journal of Vacuum Science and Technology A, 36(1), Article 01A122. https://doi.org/10.1116/1.5003729
JYU authors or editors
Publication details
All authors or editors: Kilpi, Laura; Ylivaara, Oili M. E.; Vaajoki, Antti; Liu, Xuwen; Rontu, Ville; Sintonen, Sakari; Haimi, Eero; Malm, Jari; Bosund, Markus; Tuominen, Marko; et al.
Journal or series: Journal of Vacuum Science and Technology A
ISSN: 0734-2101
eISSN: 1520-8559
Publication year: 2018
Volume: 36
Issue number: 1
Article number: 01A122
Publisher: AIP Publishing LLC
Place of Publication: Melville
Publication country: United States
Publication language: English
DOI: https://doi.org/10.1116/1.5003729
Publication open access: Not open
Publication channel open access:
Publication is parallel published (JYX): https://jyx.jyu.fi/handle/123456789/56760
Keywords: thin films; tribology; atomic layer deposition; atoms; friction; nanomaterials
Contributing organizations
Ministry reporting: Yes
VIRTA submission year: 2018
JUFO rating: 1