A1 Journal article (refereed)
Tribological properties of thin films made by atomic layer deposition sliding against silicon (2018)

Kilpi, L., Ylivaara, O. M. E., Vaajoki, A., Liu, X., Rontu, V., Sintonen, S., Haimi, E., Malm, J., Bosund, M., Tuominen, M., Sajavaara, T., Lipsanen, H., Hannula, S.-P., Puurunen, R. L., & Ronkainen, H. (2018). Tribological properties of thin films made by atomic layer deposition sliding against silicon. Journal of Vacuum Science and Technology A, 36(1), Article 01A122. https://doi.org/10.1116/1.5003729

JYU authors or editors

Malm, Jari
Sajavaara, Timo

Publication details

All authors or editors: Kilpi, Laura; Ylivaara, Oili M. E.; Vaajoki, Antti; Liu, Xuwen; Rontu, Ville; Sintonen, Sakari; Haimi, Eero; Malm, Jari; Bosund, Markus; Tuominen, Marko; et al.

Journal or series: Journal of Vacuum Science and Technology A

ISSN: 0734-2101

eISSN: 1520-8559

Publication year: 2018

Volume: 36

Issue number: 1

Article number: 01A122

Publisher: AIP Publishing LLC

Place of Publication: Melville

Publication country: United States

Publication language: English

DOI: https://doi.org/10.1116/1.5003729