A1 Journal article (refereed)
Comparison of mechanical properties and composition of magnetron sputter and plasma enhanced atomic layer deposition aluminum nitride films (2018)


Sippola, P., Perros, A. P., Ylivaara, O. M. E., Ronkainen, H., Julin, J., Liu, X., Sajavaara, T., Etula, J., Lipsanen, H., & Puurunen, R. L. (2018). Comparison of mechanical properties and composition of magnetron sputter and plasma enhanced atomic layer deposition aluminum nitride films. Journal of Vacuum Science and Technology A, 36(5), Article 051508. https://doi.org/10.1116/1.5038856


JYU authors or editors


Publication details

All authors or editors: Sippola, Perttu; Perros, Alexander Pyymaki; Ylivaara, Oili M. E.; Ronkainen, Helena; Julin, Jaakko; Liu, Xuwen; Sajavaara, Timo; Etula, Jarkko; Lipsanen, Harri; Puurunen, Riikka L.

Journal or series: Journal of Vacuum Science and Technology A

ISSN: 0734-2101

eISSN: 1520-8559

Publication year: 2018

Volume: 36

Issue number: 5

Article number: 051508

Publisher: AIP Publishing LLC

Publication country: United States

Publication language: English

DOI: https://doi.org/10.1116/1.5038856

Publication open access: Not open

Publication channel open access:

Publication is parallel published (JYX): https://jyx.jyu.fi/handle/123456789/59133


Keywords: thin films; physical properties; chemical analysis; metrology

Free keywords: X-ray diffraction; elastic moduli; mechanical testing; sputter deposition


Contributing organizations


Ministry reporting: Yes

Reporting Year: 2018

JUFO rating: 1


Last updated on 2021-17-09 at 16:29