A1 Journal article (refereed)
Superconducting tunnel junction fabrication on three-dimensional topography based on direct laser writing (2020)

Heiskanen, S., & Maasilta, I. J. (2020). Superconducting tunnel junction fabrication on three-dimensional topography based on direct laser writing. Applied Physics Letters, 117(23), Article 232601. https://doi.org/10.1063/5.0029273

JYU authors or editors

Publication details

All authors or editors: Heiskanen, Samuli; Maasilta, Ilari J.

Journal or series: Applied Physics Letters

ISSN: 0003-6951

eISSN: 1077-3118

Publication year: 2020

Publication date: 07/12/2020

Volume: 117

Issue number: 23

Article number: 232601

Publisher: American Institute of Physics

Publication country: United States

Publication language: English

DOI: https://doi.org/10.1063/5.0029273

Publication open access: Not open

Publication channel open access:

Publication is parallel published (JYX): https://jyx.jyu.fi/handle/123456789/73252

Web address of parallel published publication (pre-print): https://arxiv.org/abs/2009.09749


Superconducting junctions are widely used in a multitude of applications ranging from quantum information science and sensing to solidstate cooling. Traditionally, such devices must be fabricated on flat substrates using standard lithographic techniques. In this study, we demonstrate a highly versatile method that allows for superconducting junctions to be fabricated on a more complex topography. It is based on maskless direct laser writing and two-photon lithography, which allows writing in 3D space. We show that high-quality normal metal–insulator–superconductor tunnel junctions can be fabricated on top of a 20-lm-tall three-dimensional topography. Combined with conformal resist coating methods, this technique could allow sub-micron device fabrication on almost any type of topography in the future.

Keywords: superconductors; nanoelectronics; nanotechnology

Free keywords: phononic crystal; temperature metrology; superconductor-insulator-superconductor tunnel junction; quantum information; spin coating; cryogenics; multiphoton lithography; refrigerators; electron tunneling

Contributing organizations

Ministry reporting: Yes

Reporting Year: 2020

JUFO rating: 2

Last updated on 2022-17-06 at 10:29