A1 Journal article (refereed)
Superconducting tunnel junction fabrication on three-dimensional topography based on direct laser writing (2020)
Heiskanen, S., & Maasilta, I. J. (2020). Superconducting tunnel junction fabrication on three-dimensional topography based on direct laser writing. Applied Physics Letters, 117(23), Article 232601. https://doi.org/10.1063/5.0029273
JYU authors or editors
Publication details
All authors or editors: Heiskanen, Samuli; Maasilta, Ilari J.
Journal or series: Applied Physics Letters
ISSN: 0003-6951
eISSN: 1077-3118
Publication year: 2020
Publication date: 07/12/2020
Volume: 117
Issue number: 23
Article number: 232601
Publisher: American Institute of Physics
Publication country: United States
Publication language: English
DOI: https://doi.org/10.1063/5.0029273
Publication open access: Not open
Publication channel open access:
Publication is parallel published (JYX): https://jyx.jyu.fi/handle/123456789/73252
Web address of parallel published publication (pre-print): https://arxiv.org/abs/2009.09749
Abstract
Superconducting junctions are widely used in a multitude of applications ranging from quantum information science and sensing to solidstate cooling. Traditionally, such devices must be fabricated on flat substrates using standard lithographic techniques. In this study, we demonstrate a highly versatile method that allows for superconducting junctions to be fabricated on a more complex topography. It is based on maskless direct laser writing and two-photon lithography, which allows writing in 3D space. We show that high-quality normal metal–insulator–superconductor tunnel junctions can be fabricated on top of a 20-lm-tall three-dimensional topography. Combined with conformal resist coating methods, this technique could allow sub-micron device fabrication on almost any type of topography in the future.
Keywords: superconductors; nanoelectronics; nanotechnology
Free keywords: phononic crystal; temperature metrology; superconductor-insulator-superconductor tunnel junction; quantum information; spin coating; cryogenics; multiphoton lithography; refrigerators; electron tunneling
Contributing organizations
Ministry reporting: Yes
Reporting Year: 2020
JUFO rating: 2
