atomic layer deposition
http://www.yso.fi/onto/yso/p27468
Related publications and other outputs
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- Effect of atomic layer deposited zinc promoter on the activity of copper-on-zirconia catalysts in the hydrogenation of carbon dioxide to methanol (2023) Arandia, Aitor; et al.; A1; OA
- Area‐Selective Atomic Layer Deposition on Functionalized Graphene Prepared by Reversible Laser Oxidation (2022) Mentel, Kamila K.; et al.; A1; OA
- Atomic Layer Deposition of Intermetallic Fe4Zn9 Thin Films from Diethyl Zinc (2022) Ghiyasi, Ramin; et al.; A1; OA
- Atomic layer deposition of ternary ruthenates by combining metalorganic precursors with RuO4 as the co-reactant (2022) Minjauw, Matthias M.; et al.; A1
- Cellulose-inorganic hybrids of strongly reduced thermal conductivity (2022) Spiliopoulos, Panagiotis; et al.; A1; OA
- Hydrogen incorporation in Al2O3 thin films grown by atomic layer deposition (2022) Kinnunen, Sami; G5; OA; 978-951-39-9198-2
- Low-Temperature Atomic Layer Deposition of High-k SbOx for Thin Film Transistors (2022) Yang, Jun; et al.; A1; OA
- Spatial ALD of Al2O3 and ZnO using heavy water (2022) Kinnunen, Sami; et al.; A1; OA
- Thermomechanical properties of aluminum oxide thin films made by atomic layer deposition (2022) Ylivaara, Oili M. E.; et al.; A1; OA
- Al2O3 ALD films grown using TMA + rare isotope 2H216O and 1H218O precursors (2021) Kinnunen, Sami; et al.; A1; OA
