atomic layer deposition
http://www.yso.fi/onto/yso/p27468
Related publications
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- Atomic Layer Deposition of Intermetallic Fe4Zn9 Thin Films from Diethyl Zinc (2022) Ghiyasi, Ramin; et al.; A1; OA
- Low-Temperature Atomic Layer Deposition of High-k SbOx for Thin Film Transistors (2022) Yang, Jun; et al.; A1; OA
- Spatial ALD of Al2O3 and ZnO using heavy water (2022) Kinnunen, Sami; et al.; A1
- Al2O3 ALD films grown using TMA + rare isotope 2H216O and 1H218O precursors (2021) Kinnunen, Sami; et al.; A1; OA
- Atomic layer deposition of ternary ruthenates by combining metalorganic precursors with RuO4 as the co-reactant (2021) Minjauw, Matthias M.; et al.; A1
- Atomic scale surface modification of TiO2 3D nano-arrays : plasma enhanced atomic layer deposition of NiO for photocatalysis (2021) Innocent, Jerome W. F.; et al.; A1; OA
- Effective suppression of nanotextured black silicon surface recombination channels by aluminum oxide : comparison from sputtered and ALD grown films (2021) Parashar, Piyush Kumar; et al.; A1
- Hydrogen and Deuterium Incorporation in ZnO Films Grown by Atomic Layer Deposition (2021) Kinnunen, Sami; et al.; A1; OA
- Mechanical and optical properties of as-grown and thermally annealed titanium dioxide from titanium tetrachloride and water by atomic layer deposition (2021) Ylivaara, Oili M.E.; et al.; A1; OA
- Phosphites as precursors in atomic layer deposition thin film synthesis (2021) Kvamme, Kristian B.; et al.; A1; OA
