aluminum oxide
http://www.yso.fi/onto/yso/p38971
Related publications and other outputs
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- Hydrogen incorporation in Al2O3 thin films grown by atomic layer deposition (2022) Kinnunen, Sami; G5; OA; 978-951-39-9198-2
- Spatial ALD of Al2O3 and ZnO using heavy water (2022) Kinnunen, Sami; et al.; A1; OA
- Thermomechanical properties of aluminum oxide thin films made by atomic layer deposition (2022) Ylivaara, Oili M. E.; et al.; A1; OA
- Al2O3 ALD films grown using TMA + rare isotope 2H216O and 1H218O precursors (2021) Kinnunen, Sami; et al.; A1; OA
- Effective suppression of nanotextured black silicon surface recombination channels by aluminum oxide : comparison from sputtered and ALD grown films (2021) Parashar, Piyush Kumar; et al.; A1
- Improved stability of black silicon detectors using aluminum oxide surface passivation (2021) Heinonen, Juha; et al.; A4; OA; 978-1-5106-4549-3
- In-situ annealing characterization of atomic-layer-deposited Al2O3 in N2, H2 and vacuum atmospheres (2019) Broas, Mikael; et al.; A1; OA
- Effect of Hot Dip Galvanized Steel Surface Chemistry and Morphology on Titanium Hexafluoride Pretreatment (2017) Saarimaa, Ville; et al.; A1; OA
- Aluminum oxide from trimethylaluminum and water by atomic layer deposition: The temperature dependence of residual stress, elastic modulus, hardness and adhesion (2014) Ylivaara, Oili M.E.; et al.; A1
- Antibacterial and barrier properties of oriented polymer films with ZnO thin films applied with atomic layer deposition at low temperatures (2014) Vähä-Nissi, Mika; et al.; A1
